Description

Vibration isolation glovebox for SEM, TEM, AFM, etc. The system consists of a stand-alone purifier, a separated pump, dampers between the box and stand, bellows between pipelines. anti-vibration rubber pads, etc. to minimize vibration from the glovebox. If perovskite material is deposited on a substrate, its thickness can be measured using SEM or AFM. However, if it is exposed to the atmosphere, it becomes contaminated immediately, and the thickness cannot be accurately measured. Therefore, we integrated the measuring equipment into the glovebox to prevent exposure to the atmosphere. This vibration isolation glovebox can be used for other applications.